LCP-25 Experimental Ellipsometer
Specifications
Description | Specifications |
Thickness Measurement Range | 1 nm ~ 300 nm |
Range of Incident Angle | 30º ~ 90º , Error ≤ 0.1º |
Polarizer & Analyzer Intersection Angle | 0º ~ 180º |
Disk Angular Scale | 2º per scale |
Min. Reading of Vernier | 0.05º |
Optical Center Height | 152 mm |
Work Stage Diameter | Φ 50 mm |
Overall Dimensions | 730x230x290 mm |
Weight | Approximately 20 kg |
Part List
Description | Qty |
Ellipsometer Unit | 1 |
He-Ne Laser | 1 |
Photoelectric Amplifier | 1 |
Photo Cell | 1 |
Silica Film on Silicon Substrate | 1 |
Analysis Software CD | 1 |
Instruction Manual | 1 |
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